{"id":29784,"date":"1998-03-03T17:48:55","date_gmt":"1998-03-03T17:48:55","guid":{"rendered":"https:\/\/silvaco-stage.betagentechnologies.com\/uncategorized\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\/"},"modified":"2021-07-08T18:49:48","modified_gmt":"2021-07-09T01:49:48","slug":"scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection","status":"publish","type":"post","link":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/scanbox-approach-to-shape-reconstruction-for-automated-reticle-inspection\/","title":{"rendered":"Scanbox Approach to Shape Reconstruction for Automated Reticle Inspection"},"content":{"rendered":"<h1>Scanbox Approach to Shape Reconstruction for Automated Reticle Inspection<\/h1>\n<p class=\"feature\">Abstract<\/p>\n<p>The paper describes a generalization of the scanline approach [1] to reconstruction of the shape of planar object represented by a discrete point set with a given distance threshold d. This problem arises in applications of VLSI layout image processing, e.g., during automated reticle inspection.<\/p>\n<p>Two algorithms are presented, with time complexities O(min {n<sup>2, (n + t)log n}) and O(n log n), respectively, where n is the number of input points, t is the number of fixed-radius neighbor pairs. The first one is applicable for sparse point sets, e.g., for almost-grid point sets. In addition, ideas from the first algorithm, combined with the scanbox approach lead to the second algorithm efficient in the general case.<br \/>\n<\/sup><\/p>\n<p><img loading=\"lazy\" width=\"1210\" height=\"1669\" src=\"https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2.jpg\" class=\"cleaned-enfold-image\" alt=\"\" decoding=\"async\" loading=\"lazy\" srcset=\"https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2.jpg 1210w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-217x300.jpg 217w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-747x1030.jpg 747w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-768x1059.jpg 768w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-1114x1536.jpg 1114w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-1087x1500.jpg 1087w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-511x705.jpg 511w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-27x37.jpg 27w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-40x55.jpg 40w, https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_mar_1998_a2-35x48.jpg 35w\" sizes=\"auto, (max-width: 1210px) 100vw, 1210px\" \/><\/p>\n","protected":false},"excerpt":{"rendered":"<p>The paper describes a generalization of the scanline approach [1] to reconstruction of the shape of planar object represented by a discrete point set with a given distance threshold d. This problem arises in applications of VLSI layout image processing, e.g., during automated reticle inspection.<\/p>\n","protected":false},"author":5,"featured_media":22106,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7570],"tags":[],"class_list":["post-29784","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-simulation-standard","entry","has-media"],"_links":{"self":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/posts\/29784","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/comments?post=29784"}],"version-history":[{"count":1,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/posts\/29784\/revisions"}],"predecessor-version":[{"id":29789,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/posts\/29784\/revisions\/29789"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/media\/22106"}],"wp:attachment":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/media?parent=29784"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/categories?post=29784"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ja\/wp-json\/wp\/v2\/tags?post=29784"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}