{"id":31056,"date":"2005-11-01T00:05:51","date_gmt":"2005-11-01T00:05:51","guid":{"rendered":"https:\/\/silvaco-stage.betagentechnologies.com\/%eb%b6%84%eb%a5%98%eb%90%98%ec%a7%80-%ec%95%8a%ec%9d%8c\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/"},"modified":"2021-07-16T21:48:42","modified_gmt":"2021-07-17T04:48:42","slug":"how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis","status":"publish","type":"post","link":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/how-can-i-create-a-non-planar-structure-using-iii-v-materials-for-device-analysis\/","title":{"rendered":"How can I create a non planar structure using III-V materials for Device Analysis"},"content":{"rendered":"<h1>Hints, Tips and Solutions &#8211; November 2005<\/h1>\n<p><strong>Q.<\/strong>\u00a0How can I create a non planar structure using III-V materials for Device Analysis when the materials I want to use are not in the\u00a0<em>ATHENA<\/em>\u00a0data base.<\/p>\n<p><strong>A.<\/strong>\u00a0There are many materials in the\u00a0<strong><em>ATLAS<\/em><\/strong>\u00a0device simulator data base that are not in the\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0database, primarily because most of these exotic materials are usually deposited epitaxially and very little actual processing takes place in terms of implantation, diffusion and heat treatments.<\/p>\n<p>However, it is often desired to create a device with non vertical side-walls or a device where a non planar realistic deposit of an inter-layer di-electric plays a key role in the device operation. In these circumstances it is necessary to use the\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0process simulator. However, if the process simulator does not contain the exotic materials of interest in it\u2019s process data base, a user defined material must be used.<\/p>\n<p>There is a special feature in the Silvaco process simulator,\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0, which converts unknown user defined materials into known device simulator materials so long as the user defined material is given the exact same name as the known device simulator material.<\/p>\n<p>All that is required now to complete device construction in the process simulator,\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0, is to define the dopant materials as either donor or acceptor using the impurity statement.<\/p>\n<p>An example of the first few lines of an\u00a0<strong><em>ATHENA<\/em><\/strong>\u00a0deck is given below. The example demonstrates how to define the user defined material as both the starting substrate material and as a deposited layer<\/p>\n<p><img loading=\"lazy\" width=\"644\" height=\"800\" src=\"https:\/\/silvaco-stage.betagentechnologies.com\/wp-content\/uploads\/simulationstandard\/simstd_nov_2005_hints-e1611194748751.jpg\" class=\"cleaned-enfold-image\" alt=\"\" decoding=\"async\" loading=\"lazy\" \/><\/p>\n","protected":false},"excerpt":{"rendered":"<p>How can I create a non planar structure using III-V materials for Device Analysis when the materials I want to use are not in the\u00a0ATHENA\u00a0data base.<\/p>\n","protected":false},"author":3,"featured_media":22365,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7486],"tags":[],"class_list":["post-31056","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-simulation-standard-ko","entry","has-media"],"_links":{"self":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/posts\/31056","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/comments?post=31056"}],"version-history":[{"count":1,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/posts\/31056\/revisions"}],"predecessor-version":[{"id":31061,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/posts\/31056\/revisions\/31061"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/media\/22365"}],"wp:attachment":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/media?parent=31056"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/categories?post=31056"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/ko\/wp-json\/wp\/v2\/tags?post=31056"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}