{"id":35825,"date":"2020-02-26T19:05:55","date_gmt":"2020-02-26T19:05:55","guid":{"rendered":"https:\/\/silvaco-stage.betagentechnologies.com\/%e6%9c%aa%e5%88%86%e7%b1%bb\/mems\/"},"modified":"2020-02-26T19:05:55","modified_gmt":"2020-02-26T19:05:55","slug":"mems","status":"publish","type":"post","link":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/mems\/","title":{"rendered":"MEMS"},"content":{"rendered":"

MEMS<\/h1>\n

The full text for most of these papers may be found at the IEEE website at\u00a0www.ieee.org<\/a>.<\/p>\n

Yonghyun Shim, Member, IEEE, Jean-Pierre Raskin, Member, IEEE, C\u00e9sar Roda Neve, Member, IEEE, and Mina Rais-Zadeh, Senior Member, IEEE
\n“RF MEMS Passives on High-Resistivity Silicon Substrates”
\nIEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, VOL. 23, NO. 12, DECEMBER 2013<\/p>\n

A. Baharin, M. R. Hashim,
\n“Study of electrical characteristics of Ge islands MSM photodetector structure grown on Si substrate using conventional methods”
\nSemiconductor Science and Technology, Vol. 22, No. 8, Aug. 2007, pp. 905-910.<\/p>\n

T. Schmidt, K. Hahna, T. Binderc, J. Poppb, A. Wagener, R. Br\u00fcck,
\n“Optimization of MEMS fabrication process design by virtual experiments”
\nProceedings of SPIE – The International Society for Optical Engineering Vol. 5-8 Dec. 20, 2006<\/p>\n

Yong Qing Fu1<\/sup>, Jack Luo1<\/sup>, Stuart Milne1<\/sup>, Andrew Flewitt1<\/sup>, Ahmed Nejim2<\/sup>
\n“Process Flow Simulation and Manufacture of Variable RF MEMS Capacitors\u00a0“,
\n1<\/sup>Engineering Department, University of Cambridge, Cambridge UK
\n2<\/sup>Silvaco, St Ives, Cambridgeshire PE27 5JL, UK<\/p>\n

T. Bourouina, T. Masuzawa, H. Fujita,
\n“The MEMSNAS process: Microloading effect for micromachining 3-D structures of nearly all shapes”
\nJournal of Microelectromechanical Systems, Vol. 13, Issue 2, April 2004, pp. 190-199.<\/p>\n","protected":false},"excerpt":{"rendered":"

MEMS The full text for most of these papers may be foun […]<\/p>\n","protected":false},"author":3,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7761,7759],"tags":[],"class_list":["post-35825","post","type-post","status-publish","format-standard","hentry","category-mems-zh-hans","category-tcad-published-papers-zh-hans","entry"],"_links":{"self":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/posts\/35825","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/comments?post=35825"}],"version-history":[{"count":0,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/posts\/35825\/revisions"}],"wp:attachment":[{"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/media?parent=35825"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/categories?post=35825"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/silvaco-stage.betagentechnologies.com\/zh-hans\/wp-json\/wp\/v2\/tags?post=35825"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}